Fine Ceramics

Alumina

Alumina ceramics are widely chosen in engineering ceramics. The ceramics exhibit high electrical insulation, abrasion and corrosion resistance as well as good cost effectiveness. Ferrotec Ceramics provides a wide selection of alumina materials such as over 99.99% of high purity grade alumina and high plasma resistance alumina etc.

Applications

  • ・Chamber Parts in Semiconductor Equipment
  • ・Wafer Transfer Parts
  • ・FPD Manufacturing Equipment Parts
  • ・Heat Resistant and Electrical Insulation Parts

Characteristics table