Ferrofluidic Seals

Magnetic Fluid Seal

Ferrofluidic Seals (FerroSeals)

Multi-Axial FerroSeals

Three Coaxial and Linear Type

Model CFF022NN type
Reference Ultimate Pressure [Pa] 10-6
Operating Temperature Range [℃] Room temperature to 80
Gas Compatibility Reactive gas
Housing Material SUS304
Shaft Material SUS630
Bellows Stroke 50mm
Bellows Cycle Life 106 or more
This model has a high stiffness and achieves high run-out accuracy and rotation accuracy with a co-axial/tri-axial structure.
It allows for linear motion with 50mm strokes, making it best suited to cluster tools.
300mm wafer transfer or LCD large glass substrate transfer vacuum robots
Values in the data tables are the result of our test ,
or calculation and not guaranteed